Authorized Quorum Distributor
Category: SEM Sputter & Carbon Coaters
TurboQ S Turbo-Pumped Sputter Coater
The TurboQ S from Quorum Technologies is a state-of-the-art automated turbo-pumped sputter coater designed specifically for high-resolution electron microscopy applications. Achieving an ultra-high vacuum of 1 x 10⁻⁶ mbar, it allows for the sputtering of oxidizing metals like Chromium (Cr), Iridium (Ir), and Aluminum (Al) to produce ultra-fine grain coatings essential for FE-SEM, FEG-SEM, and FIB-SEM imaging.
Equipped with a standard 50mm tilting stage and Film Thickness Monitor (FTM), the TurboQ S ensures uniform coverage on complex 3D structures. Its advanced touchscreen interface with customizable recipes and rapid cycle times makes it the premier choice for research labs demanding superior coating quality for nanostructure analysis.
✓ 1 x 10⁻⁶ mbar Vacuum ✓ Oxidizing Metals (Cr/Ir) ✓ FTM Included
High-Res
Coating
Coating
Turbo Pumped
Vacuum
Vacuum
50mm Tilt
Stage
Stage
Touch Screen
Control
Control
Glow Discharge
Ready
Ready
Technical Specifications of TurboQ S Coater
| Quorum TurboQ S Performance Data | |
|---|---|
| Instrument Type | Turbo-Pumped Sputter Coater (Noble & Oxidizing Metals) |
| Standard Target | Chromium (Cr) (57mm Ø x 0.5mm) |
| Compatible Targets | Cr, Ir, Pt, Au, W, Au/Pd, Pd, Cu, Ag, Ti, Al, Mo, Ni |
| Sputter Current | 10 - 150 mA |
| Deposition Rate | 0.1 - 20 nm/min |
| Sputter Timer | 0 - 60 Minutes |
| Specimen Stage | Short: 65mm H, 50mm Ø | Tall: 145mm H, 50mm Ø (Rotating/Tilting) |
| Vacuum System | Turbomolecular Pump + Rotary Backing Pump |
| Ultimate Vacuum | 1 x 10-6 mbar |
| Operational Vacuum | 5 x 10-6 mbar |
| Vacuum Gauge Range | 1000 to 1 x 10-9 mbar |
| Work Chamber | Borosilicate Glass (150mm Ø x 220mm H) |
| Thickness Monitor | Film Thickness Monitor (FTM) Included |
| User Interface | Touch Screen Colour Display with Multi-colour LED Status |
| Power Supply | 100V – 240V 50/60 Hz |
| Dimensions | 440mm (W) x 556mm (H) x 551mm (D) |
| Weight | 36 kg (S Model), 53 kg (Packed) |
Comprehensive Features of TurboQ S Coater
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Ultra-High Resolution Coating Delivers ultra-fine grain size coatings using oxidizing metals like Chromium (Cr) and Iridium (Ir), essential for FE-SEM and FIB-SEM imaging up to and beyond 200k magnification.
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High Vacuum Turbo Pumping Integrated turbomolecular pump achieves a clean background vacuum of 1 x 10⁻⁶ mbar, removing oxygen and water vapour that can degrade coating quality.
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Standard 50mm Tilt Stage Ensures uniform coating of complex 3D structures and high-aspect-ratio samples, preventing charging on fracture surfaces and porous materials.
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Film Thickness Monitor (FTM) Standard inclusion allows precise termination of coating runs at a pre-set thickness (e.g., 2nm), ensuring high reproducibility for nanostructure imaging.
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Intelligent Touchscreen Control Intuitive colour interface with pre-set recipes for standard protocols and customizable profiles for advanced users.
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Visual Status Indicator Multi-colour LED lighting provides clear visual feedback on system status (pumping, coating, venting) from a distance.
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Rapid Cycle Times Fast pump-down and automated venting ensure maximum sample throughput for busy electron microscopy facilities.
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USB Data Logging Easily backup recipes and download process logs via USB for quality control and compliance.
Applications of TurboQ S Coater: Advanced Microscopy
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Ultra-High Resolution FE-SEM Use Chromium coating for SEM imaging to reveal ultra-fine surface details at high magnifications (>200k) without visible grain structure.
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FIB-SEM Sample Preparation Deposit high-quality conductive coating for FIB-SEM sample prep, ensuring stable imaging and precise milling.
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Nanotechnology & Materials Science Perfect sputter coater for nanostructure imaging and characterizing beam-sensitive materials requiring thin, continuous films.
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Oxidizing Metal Sputtering Capable of sputter coating oxidizing metals for SEM (Cr, Al, Ti) which require high-vacuum environments to prevent oxidation during deposition.
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Non-Conductive Sample Imaging Eliminate charging artifacts on challenging samples like polymers, ceramics, and biological tissues.
TurboQ S Frequently Asked Questions
The TurboQ S is a premium high-vacuum system. Please click "Get Quote" for a formal quotation tailored to your lab's needs.
Chromium produces a much finer grain structure than Gold, making it superior for ultra-high-resolution imaging where Gold grain would be visible as artifacts.
The system requires a rotary backing pump (e.g., Pfeiffer Duo 6) to support the turbo pump. We can supply this as part of a complete package.
Yes, the TurboQ S is fully compatible with noble metals like Gold (Au), Platinum (Pt), and Palladium (Pd) in addition to oxidizing metals.
No, the TurboQ S is a dedicated Sputter Coater. For combined sputtering and carbon capabilities, please see the TurboQ ES model.