Authorized Quorum Distributor
Category: SEM Sputter & Carbon Coaters
TurboQ-ES Combined Sputter & Carbon Coater
The Quorum TurboQ-ES is a premium, turbo-pumped combined system designed for high-resolution SEM and TEM sample preparation. Unlike rotary-pumped units, the TurboQ-ES utilizes a turbomolecular pump to reach high vacuum, enabling the sputtering of oxidizing metals like Chromium (Cr), Iridium (Ir), and Aluminum (Al) for ultra-fine grain coating.
This versatile system allows seamless switching between metal sputtering and carbon evaporation using a swappable head mechanism. With a 50mm tilting stage, Film Thickness Monitor (FTM), and full touch-screen control, it provides the ultimate flexibility for advanced materials science and biological imaging.
✓ Turbo-Pumped High Vac ✓ Sputter & Carbon Dual Mode ✓ Oxidizing Metals (Cr, Ir)
Combined
System
System
Turbo Pump
High Vac
High Vac
50mm Tilt
Stage
Stage
Touch Screen
Control
Control
Oxidizing
Metals
Metals
Technical Specifications of TurboQ-ES
| Quorum TurboQ-ES Performance Data | |
|---|---|
| Instrument Type | Combined Sputter Coater & Carbon Evaporator (Turbo Pumped) |
| Sputter Targets | Noble & Oxidizing: Au, Pt, Pd, Cr, Ir, Al, W (57mm Ø) |
| Sputter Current | 10 - 150 mA (Selectable) |
| Carbon Source | Carbon Rods or Carbon Fibre |
| Evaporation Current | Up to 100 A (Rods/Fibre) |
| Specimen Stage | 50mm Ø with Tilt & Rotation (Standard) |
| Vacuum System | Turbomolecular Pump + Rotary Backing Pump |
| Ultimate Vacuum | 5 x 10-5 mbar |
| Operational Vacuum | 5 x 10-3 mbar |
| Work Chamber | Borosilicate Glass (150mm Ø x 220mm H) |
| Thickness Monitor | Film Thickness Monitor (FTM) Included |
| User Interface | Touch Screen Colour Display |
| Process Gases | Argon (for sputtering) |
| Dimensions | 450mm (W) x 500mm (H) x 500mm (D) |
| Weight | ~40 kg |
Comprehensive Features of TurboQ-ES
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High Vacuum Turbo Pump Integrated turbomolecular pump ensures a clean, high-vacuum environment essential for high-quality, fine-grain coating.
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Sputtering Oxidizing Metals Unlike rotary coaters, the TurboQ-ES can sputter oxidizing metals like Chromium (Cr) and Iridium (Ir), which require high vacuum to prevent oxide formation.
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Swappable Heads Dual-functionality without compromise. Easily swap the sputtering head for the carbon evaporation head in seconds.
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High-Resolution Carbon Produces high-quality, conductive carbon films ideal for FE-SEM EDX/WDX analysis and TEM grid preparation.
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Film Thickness Monitor (FTM) Standard FTM allows for precise termination of the coating process at a pre-set thickness, ensuring reproducibility.
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Intelligent Control Fully automated control of pumping, venting, and coating cycles via a modern touchscreen interface.
Applications: High-Resolution Imaging
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FE-SEM Sample Preparation Ultra-fine grain coatings (e.g., Chromium, Iridium) are essential for resolving nanostructures in Field Emission SEMs.
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EDX / WDX Analysis Carbon evaporation provides a conductive layer that is transparent to X-rays, crucial for elemental analysis.
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TEM Grid Coating Create thin, uniform carbon support films for TEM grids.
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Beam Sensitive Samples Pulse mode sputtering reduces heat build-up, protecting delicate biological or polymer samples.
TurboQ-ES Frequently Asked Questions
The main difference is the vacuum pump. The TurboQ uses a turbo pump for high vacuum (10-5 mbar), allowing coating of oxidizing metals (Cr, Ir) for high-resolution imaging. The RotaQ uses a rotary pump (10-2 mbar) suitable for noble metals (Au, Pt) and standard SEM.
Yes, the high vacuum environment of the TurboQ-ES is specifically designed to sputter oxidizing metals like Chromium (Cr) and Aluminum (Al) effectively.
Yes, the system requires a rotary backing pump to support the turbo pump. We supply the complete package including the backing pump and connections.
Yes, the Film Thickness Monitor (FTM) is a standard feature on the TurboQ-ES, allowing you to set a specific coating thickness (e.g., 5nm) and the system will stop automatically.