The RotaQ ES from Quorum Technologies is a cutting-edge combined sputter and carbon coater engineered for automated, high-quality sample preparation for Scanning Electron Microscopy (SEM). This versatile rotary pumped sputter coater utilizes an intelligent swappable head system, enabling instantaneous tool-free transitions between noble metal sputtering (Au, Pt, Pd) and carbon fibre evaporation.
Designed specifically for Tungsten and LaB6 SEMs as well as Benchtop SEMs, the RotaQ ES comes standard with a 50mm tilting stage for uniform coating of complex 3D structures and a high-precision Film Thickness Monitor (FTM) to ensure reproducible results. With its advanced touch screen interface and Glow Discharge option, it is the ultimate solution for multi-disciplinary labs requiring both metal and carbon coating capabilities.
✓ Sputter & Carbon Dual Mode ✓ 50mm Tilt Stage ✓ FTM Included
| Quorum RotaQ ES Performance Data | |
|---|---|
| Instrument Type | Combined Sputter Coater & Carbon Evaporator (Rotary Pumped) |
| Sputter Targets | Noble Metals: Au, Au/Pd, Ag, Pt, Pt/Pd (57mm Ø x 0.1mm) |
| Sputter Current | 10 - 150 mA (Selectable) |
| Deposition Rate (Sputter) | 0.1 - 20 nm/min (e.g., for Au) |
| Carbon Source | 3.2 mm Rods or Carbon Fibre |
| Evaporation Current | 5 - 75 A (Dependent on process) |
| Outgas Current | 1 - 40 A |
| Specimen Stage | Short: 65mm H, 50mm Ø | Tall: 145mm H, 50mm Ø (Rotating/Tilting) |
| Vacuum System | Rotary Pumped (No Turbo required) |
| Ultimate Vacuum | 6 x 10-3 mbar |
| Operational Vacuum | 1 x 10-1 mbar |
| Vacuum Gauge Range | 1013 to 1 x 10-4 mbar |
| Work Chamber | Borosilicate Glass (150mm Ø x 220mm H) |
| Thickness Monitor | Film Thickness Monitor (FTM) Included |
| User Interface | Touch Screen Colour Display with Multi-colour LED Status |
| Data Interface | USB for Log Files and Recipe Backup |
| Power Supply | 90V – 240V 50/60 Hz, 1350 W |
| Dimensions | 440mm (W) x 556mm (H) x 551mm (D) |
| Weight | 34 kg (ES Model), 48 kg (Packed) |