The RotaQ S is a dedicated, fully automated rotary-pumped sputter coater from Quorum Technologies, designed for high-quality noble metal sputtering (Au, Pd, Pt). Optimized for benchtop SEMs and Tungsten/LaB6 electron microscopes, it features a standard 50mm tilting stage to ensure uniform coating of complex 3D samples. With its integrated Film Thickness Monitor (FTM) and rapid cycle times, the RotaQ S is the ideal solution for busy labs requiring consistent conductive coatings for SEM imaging.
✓ Noble Metal Sputtering ✓ 50mm Tilt Stage ✓ FTM Included
| Quorum RotaQ S Performance Data | |
|---|---|
| Instrument Type | Rotary Pumped Sputter Coater (Noble Metals) |
| Sputter Targets | Noble Metals: Au, Au/Pd, Ag, Pt, Pt/Pd (57mm Ø x 0.1mm) |
| Sputter Current | 1 - 150 mA (Selectable) |
| Deposition Rate | 0.1 - 20 nm/min (Metal Dependent) |
| Sputter Timer | 0 - 60 Minutes |
| Specimen Stage | 50mm Ø Rotating & Tilting Stage (Included) |
| Vacuum System | Rotary Pumped (No Turbo required) |
| Ultimate Vacuum | 6 x 10-3 mbar |
| Operational Vacuum | 1 x 10-1 mbar |
| Work Chamber | Borosilicate Glass (150mm Ø x 220mm H) |
| Thickness Monitor | Film Thickness Monitor (FTM) Included |
| User Interface | Touch Screen with Recipe Storage |
| Power Supply | 90V – 240V 50/60 Hz |
| Dimensions | 440mm (W) x 556mm (H) x 551mm (D) |