SEM / TEM Sample Preparation
Category: SEM Sputter & Carbon Coaters
Q300T T Plus Triple-Head Turbo Sputter Coater
The Q300T T Plus from Quorum Technologies is a large-chamber triple sputter coater designed for the uniform coating of large samples up to 8"/200mm Ø. Utilizing a triple head turbo sputter coater configuration, it ensures ultra-consistent deposition of both oxidizing and non-oxidizing metals (Cr, Au, Pt) across 200mm wafers and multiple specimens.
This large chamber sputter coater features a 300mm borosilicate chamber and a specialized rotating wafer stage for industrial SEM sample prep. With an ultimate vacuum of 5 x 10⁻⁵ mbar and an advanced touchscreen turbo coater 16GB recipes interface, it is the premier wafer sputter coater for semiconductor wafer SEM sample prep and thin-film research.
✓ 200mm (8") Wafer Capacity ✓ Triple-Head Uniformity ✓ 5 x 10⁻⁵ mbar Vacuum
Triple Head
Sputtering
Sputtering
Turbo Pumped
High Vacuum
High Vacuum
8-Inch Wafer
Capacity
Capacity
Rotating
Wafer Stage
Wafer Stage
Large Chamber
300mm Ø
300mm Ø
Technical Specifications: Q300T T Plus Coater
| Quorum Q300T T Plus Performance Data | |
|---|---|
| Instrument Type | Triple head turbo sputter coater |
| Vacuum Performance | triple sputter head 5×10⁻⁵ mbar turbo coater |
| Chamber Size | Q300T T Plus 300mm Ø × 127mm borosilicate chamber |
| Standard Targets | Cr 0.5mm thick targets (3x) standard (57mm Ø) |
| Specimen Stage | 6"/8" wafer rotation stage 14-38 rpm |
| User Interface | 640×480 capacitive touchscreen 16GB memory |
| Data Logging | 1000 coating log + maintenance alerts |
| Dimensions | 590×535×420mm (772mm open height) |
| Weight | 36 kg (Packed weight: 59 kg) |
Key Features: High-Uniformity Industrial Sputtering
-
Triple Head Sputter Performance The triple head turbo sputter coater configuration uses three targets simultaneously to ensure uniform coating of large samples and wafers up to 200mm.
-
Industrial Wafer Sputter Coater Specifically designed as a Q300T T Plus large wafer coater, it provides high-purity Cr sputtering for SEM/FE-SEM imaging and inspection.
-
Large Diameter Specimen Stage Features a rotating wafer stage 6"/8" coater with a swinging arm to maximize multiple specimen high-throughput sputtering efficiency.
-
Comprehensive Process Logging Includes multi-user profiles Q300T T Plus and a 1000 coating log to ensure traceability in semiconductor research and thin film deposition large samples.
Applications: Wafer Inspection & FE-SEM Prep
-
Semiconductor Wafer Sample Preparation The standard wafer inspection sample preparation tool for semiconductor wafer SEM sample prep in fab labs.
-
High-Resolution conductive coating Ideal high resolution SEM conductive coating for large specimens, delivering fine-grain Cr or Pt layers for FE-SEM analysis.
-
Thin Film Applications A dedicated thin film sputter coater for Q300T T Plus for thin film apps where thickness uniformity is critical across large areas.
-
High-Throughput Batch Processing A high throughput sputtering system that allows for large diameter specimen SEM coating of many small samples in one run.
Q300T T Plus Frequently Asked Questions (FAQ)
A triple sputter coater provides significantly better thickness uniformity across the surface of a 200mm sample coater compared to single or dual head systems.
It includes chromium Cr triple sputter coater configuration with three 57mm Ø Cr targets as standard for oxidizing metal coating.
The large chamber SEM coater cost depends on target materials and optional rotary backing pumps. Please request a Q300T T Plus quotation for detailed pricing.
Yes, as the official triple sputter coater supplier, we offer full Q300T T Plus installation and service support nationwide.