SEM / TEM Sample Preparation
Category: SEM Sputter & Carbon Coaters
Q300T ES Plus Turbo-Pumped Sputter & Carbon Coater
The Q300T ES Plus from Quorum Technologies is a large-chamber turbo pumped combined sputter + carbon coater engineered for large-scale and high-throughput laboratory environments. Featuring a 300mm borosilicate chamber, it handles sputtering large wafers up to 150mm SEM and multi-specimen arrays with an ultimate vacuum of 5 x 10⁻⁵ mbar.
This versatile system provides combined sputtering carbon evaporation in one industrial EM coating system. Equipped with a swinging arm wafer stage coater (14-38 rpm) and a 640x480 capacitive touchscreen 16GB memory interface, it is the premier wafer sputter coater for high-resolution SEM/FIB-SEM sample prep.
✓ 150mm (6") Wafer Capacity ✓ Sputter & Carbon Combined ✓ 5 x 10⁻⁵ mbar Vacuum
Large
Chamber
Chamber
Turbo Pumped
High Vacuum
High Vacuum
6-Inch Wafer
Capacity
Capacity
Touch Screen
Recipes
Recipes
Combined
Sputter & Carbon
Sputter & Carbon
Technical Specifications: Q300T ES Plus Coater
| Quorum Q300T ES Plus Performance Data | |
|---|---|
| Instrument Type | Turbo pumped large chamber coater |
| Vacuum Performance | turbo pumped coater 5×10⁻⁵ mbar vacuum |
| Chamber Size | Q300T ES Plus 300mm Ø × 127mm borosilicate chamber |
| Standard Targets | Cr 57mm Ø 0.5mm target + carbon rod standard |
| Specimen Stage | 4"/6" wafer swinging arm stage 14-38 rpm |
| User Interface | 640x480 capacitive touchscreen 16GB memory |
| Data Logging | 1000 coating log + maintenance reminders |
| Dimensions | 590×535×420mm (772mm open height) |
| Weight | 36 kg (Packed weight: 59 kg) |
Key Features: Advanced Wafer & Large Sample Prep
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High-Capacity Combined Platform The Q300T ES Plus sputter coater seamlessly integrates metal sputtering and carbon rod evaporation for high-volume high capacity SEM coater needs.
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Optimized for Oxidizing Metals Engineered for Q300T ES Plus oxidizing metal sputtering, allowing for clean, contamination-free deposition of Cr, Al, and Ti.
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Wafer-Scale Precision A dedicated Q300T ES Plus wafer coater 150mm system that ensures uniform coating 4"/6" silicon wafers on its rotating stage.
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Intelligent Software Architecture Stores 1000+ recipes and features multi-user profiles Q300T ES Plus for industrial high vacuum SEM sample prep.
Applications: Semiconductor & Industrial Research
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Chromium Carbon Combined Coating Provides chromium carbon coater turbo pumped quality for Cr coating for SEM imaging and simultaneous conductive support.
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Elemental Analysis Support Deposits ultra-pure carbon coating for elemental analysis (EDS/WDS) that is transparent to X-ray signals.
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Large Specimen Batch Processing Designed for large specimen high-throughput coating, significantly reducing sample turnaround time for busy labs.
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FE-SEM Conductive Coating Achieves high-density conductive coating for FIB-SEM and ultra-fine grain layers for advanced FE-SEM imaging.
Q300T ES Plus Frequently Asked Questions (FAQ)
Yes, it is a SEM/FIB-SEM combined coater that allows you to switch between metal sputtering and carbon rod evaporation without venting the chamber.
The swinging arm wafer stage coater is optimized for sputtering large wafers up to 150mm SEM (6-inch wafers).
The turbo sputter carbon coater cost varies based on the backing pump and target materials. Request a Q300T ES Plus quotation for official INR pricing.
Yes, as the authorized large chamber SEM coater supplier, we offer complete Q300T ES Plus installation service and ongoing maintenance support.