SEM / TEM Sample Preparation
Category: SEM Sputter & Carbon Coaters
Q300T D Plus Dual-Head Turbo Sputter Coater
The Q300T D Plus from Quorum Technologies is a high-performance dual sputter coater designed for multi-layer sequential sputtering of two different metals without breaking vacuum. Equipped with a large 300mm chamber SEM coater design, it is the ideal wafer sputter coater for 6" wafer sputter coater applications and large industrial specimens.
This turbo pumped sputter coater features a swinging arm rotating stage coater ensuring uniform coverage across large 150mm Ø samples. With its Cr Au dual target sputter coater setup and a sophisticated touchscreen turbo sputter coater 16GB recipes interface, it facilitates high-throughput SEM coater workflows for semiconductor inspection and thin-film research.
✓ Dual Sequential Sputtering ✓ 6" Wafer Capacity ✓ 5 x 10⁻⁵ mbar Vacuum
Dual Head
Sputtering
Sputtering
Turbo Pumped
High Vacuum
High Vacuum
6-Inch Wafer
Capacity
Capacity
Swinging Arm
Rotating Stage
Rotating Stage
Multi-Layer
Coating
Coating
Technical Specifications: Q300T D Plus Coater
| Quorum Q300T D Plus Performance Data | |
|---|---|
| Instrument Type | Dual head turbo sputter coater |
| Vacuum Performance | dual sputter head 5×10⁻⁵ mbar turbo coater |
| Chamber Size | Q300T D Plus 300mm Ø × 127mm borosilicate chamber |
| Standard Targets | Cr 0.5mm + Au 0.1mm targets (57mm Ø) |
| Specimen Stage | 4"/6" wafer stage swinging arm 14-38 rpm rotation |
| User Interface | 640×480 capacitive touchscreen 16GB memory |
| Data Logging | 1000 coating log + maintenance reminders |
| Dimensions | 590×535×420mm (772mm open height) |
| Weight | 36 kg (Packed weight: 59 kg) |
Key Features: Multi-Layer Sequential Sputtering
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Large Sample SEM Coater Design The large chamber sputter coater architecture accommodates specimens up to 150mm Ø, making it the perfect wafer sputter coater for semiconductor labs.
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Sequential Multi-Metal Coating Achieve sequential Cr Au sputtering without vacuum break for multi-layer metal coating SEM samples and advanced thin film applications.
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Superior Coating Uniformity The swinging arm rotating stage coater moves the sample between targets to ensure precise and uniform two metal sputter coater results.
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Intelligent Software Control Features multi-user profiles Q300T D Plus and storage for 1000+ recipes, enabling consistent high throughput SEM coater operation.
Applications: Industrial & Research SEM Prep
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Wafer Inspection & Inspection Coating Ideal for wafer inspection sample coating and large 150mm samples SEM preparation in industrial inspection settings.
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Advanced FE-SEM Sample Prep Provides ultra-fine grain SEM/FE-SEM multi-metal coating conductive layers for high-magnification semiconductor analysis.
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Multi-Layer Thin Film Applications Optimized for thin film applications dual sputtering where different metal layers (e.g., adhesion + conductive) are required.
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High-Throughput Labs The high-throughput sample prep sputtering capability significantly reduces downtime between different coating materials.
Q300T D Plus Frequently Asked Questions (FAQ)
Yes, the sequential sputtering system allows for the coating of two different metals (like Chromium and Gold) in a single run without breaking vacuum.
It is designed as a large sample SEM coater, comfortably handling up to 6" wafers (150mm Ø) on its rotating stage.
The turbo pumped wafer coater cost depends on your target choices and vacuum pump options. Please request a large chamber SEM coater quote for official INR pricing.
Yes, as the authorized Q300T D Plus distributor, we provide comprehensive installation training and service support for all industrial labs.